Such product is the basement for subsequent UVC-LED device fabrication. After treated by series of tape-out processes, e. g.
photolithography, electrode deposition et al., the UVC-LED is fabricated, and it presents excellent sterilization performance to
various microorganism, including Coronavirus-19. Currently we have successfully achieved 2 inch UVC-LED epilayer with uniform
265 nm irradiation wavelength.


Parameters | Specification |
Peak wavelength | 265 nm |
Diameter | 50.8 mm |
Substrate thickness | 430 ± 20 µm |
Total Epi-layer thickness | 5.0 ± 0.3 µm |
Wavelength uniformity | < 2 nm |
FWHM | 12 ± 1 nm |
Output power (20mA) | 2 ± 0.5 mW |
Forward Voltage (20mA) | 8.7 ± 0.5 V |
Edge exclusion | 3 mm |
Surface Crack | ≤ 50 |
Bowing | ≤ 150 µm |